The integrated circuit clean room is a clean room that meets the needs of the semiconductor manufacturing process. The clean room has certain requirements for environmental cleanliness, temperature and humidity, vibration, ESD, and AMC control. Compared to other industrial cleanrooms, integrated circuit manufacturing dust-free workshops have features such as large area, high cleanliness level, and high temperature and humidity control accuracy.
According to the characteristics of the clean room workshop air circulation, the clean room can be divided into three types: a circulating air conditioner with an efficient air supply system, a circulating fan with a wet sealing system, and a FFU circulation system.
The first form is widely used in the design of small-scale and low-level clean room workshops. For large-scale and high-grade clean workshops, there are disadvantages such as high operating costs and excessive space occupation.
The second form of design can meet the high-level requirements of large-area cleanrooms for integrated circuit manufacturing, but the operating costs are high, and the clean room wind speed, air volume adjustment is difficult, the system upgrade is difficult, so the operating flexibility is very low.
The third type of FFU cycle system not only saves operating space, has a high degree of cleanliness, safety, low operating costs, and high operational flexibility. It can be upgraded and adjusted at any time without affecting production. To meet the needs of semiconductor manufacturing, FFU circulation system in the semiconductor manufacturing industry has gradually become the most important purification design.
The characteristics of the FFU circulation system are: the entire clean room is composed of a static pressure layer, a process layer, a process auxiliary layer and a return air passage. The FFU provides the power of circulating air, and the fresh air and circulating wind are mixed and sent to the process through the ultra-efficient filter. The layers and process auxiliary layers are negative pressure with respect to the process layer. In addition, there is an auxiliary production area for IC manufacturing facilities, including electricity supply, gas and chemical supply, and ultrapure water supply.
Integrated circuit manufacturing has stricter requirements for the control of clean room environment. Different process processes have different requirements for cleanliness. For example, photolithography requires a micro-environment in Class 1, while chemical mechanical grinding requires only a Class 1000 environment.
In addition, IC manufacturing clean plants have relevant regulations and requirements for noise, vibration, and illumination, especially vibration control, which must be required in the design of the building structure of the clean room.
A good cleanroom design not only saves energy, lowers operating costs, and reduces manpower investment, but also provides safe and reliable guarantees for production. Among the three types of clean systems, the FFU cycle system has the lowest operating costs and the highest degree of cleanliness and safety. Therefore, the FFU cycle system is often used in integrated circuit cleanrooms. The higher the cleanliness requirements, the higher the precision of temperature and humidity control, the higher the investment and operating costs of the cleanroom. Therefore, in the environment with relatively low cleanliness or temperature and humidity requirements, some key process equipments are arranged at higher levels. The cleanliness or temperature and humidity control area is a design trend for IC manufacturing cleanrooms.
Integrated circuit manufacturing is a high-energy-consuming industry, and the energy consumption of clean air-conditioning systems accounts for more than 30% of them. Therefore, energy-saving and safe clean room design and various heat recovery designs will be the future direction of development.
With the continuous upgrading of integrated circuit manufacturing technology, major manufacturers have entered the nano era, and the design and construction of integrated circuit manufacturing clean plants and energy-saving innovations also need to be continuously upgraded to provide guarantees for the production of advanced process products.
Zhejiang Sujing Purification Equipment Co., Ltd. is located in Daoshui Town, Shangyu District, Shaoxing City, Zhejiang Province and is an excellent manufacturer in the purification equipment industry in East China. Can provide professional air purification systems for industries such as microelectronics, biomedicine, hospital operating rooms, fiber optic cables, food and beverages, precision instruments, semiconductors, and new material applications in accordance with the ISO14644-1 standard, GB50073-2001 national standard, and national GMP specifications. Engineering design, construction, testing and technical services.
The company's main purification table series, air shower series, fume hood series, biological safety cabinet series are widely used in medical and health, electronics, pharmaceuticals, biology, food, agriculture, forestry, animal husbandry and veterinary, inspection and quarantine, aerospace, automotive manufacturing, Precision instruments, universities and research institutes enjoy a high reputation in the domestic and Southeast Asian markets.
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